DESIGN OF A HIGH-RESOLUTION MICROFLUIDIC MICROWAVE MEMS PHASE SHIFTER

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Ozbey B., Ozturk S., AKTAŞ Ö.

MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, cilt.53, sa.8, ss.1902-1905, 2011 (SCI-Expanded) identifier identifier

  • Yayın Türü: Makale / Tam Makale
  • Cilt numarası: 53 Sayı: 8
  • Basım Tarihi: 2011
  • Doi Numarası: 10.1002/mop.26127
  • Dergi Adı: MICROWAVE AND OPTICAL TECHNOLOGY LETTERS
  • Derginin Tarandığı İndeksler: Science Citation Index Expanded (SCI-EXPANDED), Scopus
  • Sayfa Sayıları: ss.1902-1905
  • Anahtar Kelimeler: MEMS, phase shifter, microfluidics, BAND, SWITCHES
  • Ankara Üniversitesi Adresli: Hayır

Özet

In this article, a novel microwave microelectromechanical phase shifter based on a microfluidic design is proposed and demonstrated. The design principles, the fabrication process, and experimental results (S-parameters and phase shift plots) are presented. The proposed system has a high bandwidth, high-power handling capacity, and a high-resolution along with a small settling time. (C) 2011 Wiley Periodicals, Inc. Microwave Opt Technol Lett 53:1902-1905, 2011; View this article online at wileyonlinelibrary. com. DOI 10.1002/mop.26127