AKAOĞLU, B. Et Al. 2003. Thickness and optical constant distributions of PECVD a-SiCx : H thin films along electrode radial direction. THIN SOLID FILMS , vol.437, no.1-2 , 257-265.

AKAOĞLU, B., Atilgan, I., & Katircioglu, B., (2003). Thickness and optical constant distributions of PECVD a-SiCx : H thin films along electrode radial direction. THIN SOLID FILMS , vol.437, no.1-2, 257-265.

AKAOĞLU, BARIŞ, I Atilgan, And B Katircioglu. "Thickness and optical constant distributions of PECVD a-SiCx : H thin films along electrode radial direction," THIN SOLID FILMS , vol.437, no.1-2, 257-265, 2003

AKAOĞLU, BARIŞ Et Al. "Thickness and optical constant distributions of PECVD a-SiCx : H thin films along electrode radial direction." THIN SOLID FILMS , vol.437, no.1-2, pp.257-265, 2003

AKAOĞLU, B. Atilgan, I. And Katircioglu, B. (2003) . "Thickness and optical constant distributions of PECVD a-SiCx : H thin films along electrode radial direction." THIN SOLID FILMS , vol.437, no.1-2, pp.257-265.

@article{article, author={BARIŞ AKAOĞLU Et Al. }, title={Thickness and optical constant distributions of PECVD a-SiCx : H thin films along electrode radial direction}, journal={THIN SOLID FILMS}, year=2003, pages={257-265} }